Process Integration and Yield Engineering

Students will learn to integrate individual unit processes into a coherent manufacturing flow, focusing on the critical interactions between process steps that impact device performance and yield. The course covers advanced topics in yield modeling, defect reduction strategies, and statistical process control for semiconductor devices. Emphasis is placed on practical problem-solving, failure analysis techniques, and design for manufacturability within an online learning environment.

Course outline

Lectures, virtual labs, and graded assignments — completed in your browser.

01Introduction to Semiconductor Manufacturing and Process Integration Overviewlecture

02Front-End-of-Line (FEOL) Integration: Transistor Formationlecture

03Middle-of-Line (MOL) Integration: Contacts and Local Interconnectslecture

04Back-End-of-Line (BEOL) Integration: Metallization and Dielectric Stackslecture

05Process Module Interactions and Integration Challengeslecture

06Introduction to Yield Engineering: Definitions and Metricslecture

07Defect Sources, Mechanisms, and Characterization Techniqueslecture

08Statistical Process Control (SPC) and Design of Experiments (DOE) in Yield Managementlecture

09Yield Modeling and Analysis Techniqueslecture

10Failure Analysis Methodologies and Root Cause Identificationlecture

11Design for Manufacturability (DFM) and Design for Yield (DFY)lecture

12Process Integration for Advanced Device Architectures (e.g., FinFET, GAA)lecture

13Reliability Engineering and Qualification of Semiconductor Deviceslecture

14Advanced Yield Enhancement Strategies and Future Trends in Process Integrationlecture

Syllabus

Each week features online lectures, readings, and discussion forums, culminating in a graded assignment or lab simulation. Collaboration on select projects is encouraged to foster team-based problem-solving skills. Late submissions will incur a penalty, and academic integrity is strictly enforced with zero tolerance for plagiarism. Students are expected to actively participate in online discussions and complete all assigned tasks by their respective deadlines. A final project involving yield analysis of a hypothetical process flow will be a major component of the course grade.