Fab Equipment Engineering and Automation

SEB 360 delves into the core principles of semiconductor fabrication equipment, including mechanics, vacuum systems, gas delivery, and thermal processes. Students will explore automation architectures, robotic material handling, process control, and metrology integration in a manufacturing environment. The course emphasizes practical problem-solving, preventative maintenance strategies, and data-driven optimization for semiconductor production lines. Upon completion, students will be equipped to contribute to the operation, maintenance, and improvement of advanced fab equipment.

Course outline

Lectures, virtual labs, and graded assignments — completed in your browser.

01Introduction to Fab Equipment Engineering and Automationlecture

02Semiconductor Manufacturing Overview and Equipment Classificationlecture

03Vacuum Systems: Principles, Components, and Applicationslecture

04Gas Delivery Systems: Safety, Purity, and Controllecture

05Fluid and Thermal Systems in Semiconductor Processinglecture

06Materials Handling Automation: Robotics, AGVs, and AMHSlecture

07Process Control Systems (PCS) and Advanced Process Control (APC)lecture

08Sensors, Actuators, and Metrology Integration in Fab Toolslecture

09Data Acquisition, Analysis, and Equipment Monitoringlecture

10Equipment Reliability, Maintainability, and FMEAlecture

11Predictive Maintenance and Equipment Uptime Optimizationlecture

12Smart Manufacturing and Industry 4.0 in Semiconductorslecture

13Equipment Installation, Qualification, and Commissioninglecture

14Future Trends in Fab Automation and Equipment Engineeringlecture

Syllabus

Each week will feature recorded lectures, readings, and practical exercises or case studies, with submissions due Sunday evening. Active participation in online discussions is expected, fostering peer-to-peer learning and problem-solving. Policies include strict adherence to academic integrity, timely submission of assignments, and respectful communication with instructors and classmates. Weekly quizzes will reinforce core concepts, leading to a mid-term exam and a final project applying course knowledge to a real-world scenario. Students are expected to dedicate 8-10 hours per week to course material, including self-study and assignment completion. Consistent engagement is key for success.