Contamination Control and Cleanroom Systems

Students will explore the sources, types, and effects of contamination on semiconductor devices and processes. The course delves into cleanroom classifications, design principles, HVAC systems, filtration technologies, and operational protocols. Emphasis is placed on gowning procedures, material handling, and monitoring techniques to maintain ultra-clean environments. Practical applications and industry best practices for achieving and sustaining critical contamination control will be examined.

Course outline

Lectures, virtual labs, and graded assignments — completed in your browser.

01Introduction to Contamination Control in Semiconductor Manufacturinglecture

02Types and Sources of Contamination: Particulates, Chemicals, and Microorganismslecture

03Impact of Contamination on Semiconductor Device Yield and Reliabilitylecture

04Cleanroom Classifications and Standards (ISO 14644, Federal Standard 209)lecture

05Principles of Airflow and HVAC Systems in Cleanroomslecture

06Filtration Technologies: HEPA, ULPA Filters, and Chemical Filterslecture

07Cleanroom Design Elements: Layout, Materials, and Constructionlecture

08Midterm Examlecture

09Cleanroom Operational Protocols: Gowning, Entry, and Exit Procedureslecture

10Material Handling and Equipment Management in Cleanroomslecture

11Contamination Monitoring Techniques: Particle Counters, Witness Plates, and Surface Analysislecture

12Electrostatic Discharge (ESD) Control in Cleanroomslecture

13Chemical Safety and Waste Management in Critical Environmentslecture

14Final Project Presentations and Course Reviewlecture

Syllabus

This 14-week online course involves weekly modules with lectures, readings, discussion forums, and assignments due each Sunday. Active participation in discussions is mandatory, contributing significantly to the final grade. Students are expected to complete quizzes and a midterm exam covering foundational concepts. A final project involving a cleanroom design or contamination control plan will demonstrate practical application of course material. Late submissions will incur penalties, and academic integrity is strictly enforced. Timely engagement with course materials and communication with the instructor are vital for success.