Advanced Process Modeling and Simulation

Students will explore fundamental physical and chemical processes in semiconductor fabrication through the lens of advanced computational models. The course emphasizes the use of industry-standard simulation tools and methodologies for process optimization, device design, and yield enhancement. Practical application of modeling techniques to solve complex engineering challenges in semiconductor technology will be a core focus. Graduates will be equipped with critical skills for R&D and manufacturing roles.

Course outline

Lectures, virtual labs, and graded assignments — completed in your browser.

01Introduction to Advanced Process Modeling & Simulationlecture

02Fundamental Physics of Semiconductor Processinglecture

03Advanced Numerical Methods for Process Simulationlecture

04Device Simulation Fundamentals and TCAD Toolslecture

05Material Transport and Reaction Kinetics Modelinglecture

06Lithography Process Modeling and Optical Proximity Correctionlecture

07Etch and Deposition Process Modeling (PVD, CVD, ALD)lecture

08Ion Implantation and Diffusion Simulationlecture

09Thermal Processes: Annealing and Oxidation Modelinglecture

10Stress and Mechanical Modeling in Semiconductor Deviceslecture

11Advanced Characterization Techniques and Model Calibrationlecture

12Design of Experiments (DOE) for Simulation and Optimizationlecture

13Predictive Modeling and Machine Learning in Semiconductor Manufacturinglecture

14Integrated Process Flow Simulation and Yield Analysislecture

Syllabus

This online course is structured over 14 weeks, with each week featuring lecture materials, assigned readings, and hands-on simulation exercises. Weekly participation in discussion forums is mandatory, fostering peer learning and critical analysis of simulation results. Students will complete several modeling assignments using industry software, culminating in a final project where they apply advanced simulation techniques to a real-world semiconductor process problem. Late submissions will incur a penalty unless prior arrangements are made with the instructor. Academic integrity is paramount, and all submitted work must be original; plagiarism will not be tolerated. Expect to dedicate 9-12 hours per week to course activities, including lectures, labs, and project work. A strong foundation in semiconductor physics and programming is assumed.