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SET 125
Term 2
3 credits

Cleanroom Protocols, Safety, and ESD Control

Students will master the stringent protocols required for working effectively and safely within semiconductor cleanroom facilities. The curriculum covers proper gowning procedures, air quality standards, and the principles of particle reduction to prevent product contamination. Key topics include understanding and mitigating chemical, physical, and biological hazards, implementing emergency procedures, and proficiently utilizing personal protective equipment. Emphasis is placed on the science of electrostatic discharge and practical techniques for its control, ensuring students are prepared to maintain product integrity and a secure workspace in advanced microelectronics settings.

Prerequisites

Course outline

Lectures, virtual labs, and graded assignments — completed in your browser.

01Understanding Cleanroom Fundamentalslecture
02Sources and Prevention of Contaminationlecture
03Cleanroom Standards and HVAC Systemslecture
04Mastering Aseptic Gowning Techniqueslecture
05Safe Material and Equipment Entrylecture
06Hazardous Chemical Safetylecture
07Working with Industrial Gaseslecture
08Emergency Response in Controlled Environmentslecture
09The Science of Static Electricitylecture
10Grounding and Ionization for ESDlecture
11Selecting ESD-Safe Equipmentlecture
12Measuring and Verifying ESD Protectionlecture
13Cleanroom Performance and Auditslecture
14Optimizing Cleanroom Workflowslecture

Syllabus

Week 1: Introduction to Semiconductor Manufacturing and Cleanroom Environments
Week 2: Cleanroom Classifications and Airflow Dynamics
Week 3: Personal Gowning Procedures and Contamination Sources
Week 4: Chemical Safety in the Cleanroom
Week 5: Gas Handling and Storage Safety
Week 6: Electrical Safety and Lockout/Tagout Procedures
Week 7: Emergency Response and Evacuation Protocols
Week 8: Introduction to Electrostatic Discharge (ESD) Principles
Week 9: ESD Measurement and Monitoring
Week 10: ESD Control Programs and Best Practices
Week 11: Wafer Handling and Tool Operation Ethics
Week 12: Hazard Communication and Material Safety Data Sheets (MSDS/SDS)
Week 13: Cleanroom Etiquette and Professionalism
Week 14: Review and Practical Application