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SET 230
Term 5
3 credits

Process Control, SPC, and Yield Engineering

Students will master the core concepts and methodologies for maintaining high-quality, high-yield semiconductor fabrication processes. The curriculum covers statistical process control (SPC) techniques, control charting, process capability analysis, and strategies for identifying and mitigating yield loss mechanisms in a manufacturing environment. Through practical examples and case studies, learners will develop the analytical skills necessary to monitor, analyze, and optimize semiconductor production lines. Graduates will be equipped to implement and manage robust process control systems, interpret critical manufacturing data, and drive continuous improvement initiatives to enhance product quality and profitability within the semiconductor industry.

Prerequisites

Course outline

Lectures, virtual labs, and graded assignments — completed in your browser.

01Semiconductor Quality and Process Control Overviewlecture
02Statistical Foundations for Manufacturinglecture
03Measurement Systems and Process Variationlecture
04Fundamentals of Statistical Process Controllecture
05Variable Data Control Chart Applicationlecture
06Attribute Data Control Chart Interpretationlecture
07Process Capability and Performance Metricslecture
08Interpreting Control Chart Signalslecture
09Introduction to Semiconductor Yield Engineeringlecture
10Analyzing Yield Loss and Defect Pareto Analysislecture
11Defect Density and Excursion Management Strategieslecture
12Root Cause Investigation Techniqueslecture
13Advanced Process Control Principleslecture
14Continuous Improvement and Industry Best Practiceslecture

Syllabus

Week 1: Introduction to Process Control in Semiconductor Manufacturing
Week 2: Fundamentals of Variation and Data Analysis
Week 3: Basic Statistical Process Control (SPC) Concepts
Week 4: Control Charts for Variables (X-bar and R/s Charts)
Week 5: Control Charts for Attributes (p, np, c, u Charts)
Week 6: Process Capability Indices (Cp, Cpk, Pp, Ppk)
Week 7: Interpreting Control Charts and Out-of-Control Conditions
Week 8: Introduction to Yield Engineering and Semiconductor Yield Drivers
Week 9: Defect Characterization and Analysis Techniques
Week 10: Yield Modeling and Prediction
Week 11: Root Cause Analysis for Yield Loss
Week 12: Advanced Process Control (APC) Overview
Week 13: Design of Experiments (DOE) for Process Optimization
Week 14: Integrated Process Control and Yield Improvement Strategies