Metrology and Inspection for Manufacturing

Students will explore the fundamental principles, instrumentation, and applications of various metrology and inspection methods used throughout the semiconductor fabrication process. Topics include optical, electrical, and physical measurement techniques, along with an emphasis on data analysis and statistical process control for defect detection and yield improvement. Upon completion, students will be able to select appropriate metrology tools, interpret measurement data, and contribute to maintaining stringent quality standards in a semiconductor production environment.

Prerequisites

SET 230

Course outline

Lectures, virtual labs, and graded assignments — completed in your browser.

01Introduction to Measurement Science in Semiconductorslecture

02Optical Principles for Wafer Inspectionlecture

03Measuring Linewidths and Gaps with Precisionlecture

04Characterizing Dielectric and Conductive Layerslecture

05Probing Electrical Properties of Deviceslecture

06Assessing Surface Uniformity and Texturelecture

07Identifying and Classifying Wafer Defectslecture

08Monitoring Airborne and Surface Particulateslecture

09Electron Beam Imaging for Material Analysislecture

10Compositional and Structural Analysis via X-rayslecture

11Nanoscale Surface Imaging with AFMlecture

12Metrology Challenges for Advanced Device Architectureslecture

13Applying Statistics to Process Control and Qualitylecture

14Interpreting Metrology Data for Production Optimizationlecture

Syllabus

Week 1: Introduction to Semiconductor Metrology and Inspection
Week 2: Fundamental Principles of Measurement and Error Analysis
Week 3: Optical Metrology Techniques: Overview and Applications
Week 4: Critical Dimension (CD) Metrology: CD-SEM and CD-AFM
Week 5: Thin Film Metrology: Ellipsometry and Reflectometry
Week 6: Surface Topography and Roughness Metrology: AFM and Stylus Profilometry
Week 7: Defect Inspection Techniques: Brightfield, Darkfield, and E-Beam Inspection
Week 8: Particle Contamination Monitoring and Control
Week 9: Electrical Test and Parametric Metrology
Week 10: Overlay Metrology and Alignment Control
Week 11: Stress and Strain Measurement in Semiconductor Devices
Week 12: Advanced Metrology: X-ray Techniques and Acoustic Microscopy
Week 13: Statistical Process Control (SPC) and Data Analysis for Metrology
Week 14: Automated Metrology Systems and Future Trends in Inspection