MEMS, Sensors, and Emerging Device Technologies
This course provides a comprehensive examination of Micro-Electro-Mechanical Systems (MEMS), foundational sensor technologies, and advanced semiconductor devices driving innovation. Students will gain an understanding of MEMS design considerations, microfabrication techniques, and the operational characteristics of diverse sensor types including chemical, optical, and biological sensors. Emphasis is placed on the integration of these components into functional systems, exploring packaging challenges and reliability. Graduates will be equipped to analyze emerging device architectures, contribute to the development of next-generation smart devices, and troubleshoot sensor-based systems in semiconductor and related industries.
Course outline
Lectures, virtual labs, and graded assignments — completed in your browser.
Syllabus
Week 1: Introduction to MEMS and Microsystems Week 2: MEMS Materials and Basic Fabrication Processes Week 3: Photolithography and Etching Techniques for MEMS Week 4: Thin Film Deposition and Wafer Bonding Week 5: MEMS Actuators and Resonators Week 6: Piezoresistive and Piezoelectric Sensors Week 7: Capacitive and Inductive Sensors Week 8: Optical Sensors and Image Imagers Week 9: Chemical and Biological Sensors Week 10: Sensor Interfacing and Signal Conditioning Week 11: MEMS Packaging and Reliability Week 12: Advanced Transistor Architectures and 3D Integration Week 13: Neuromorphic and Quantum Computing Devices Week 14: Future Trends and Applications of Emerging Technologies