Field Service, Diagnostics and Fleet Support
MET 115 provides comprehensive training for aspiring semiconductor optical metrology tool technicians, equipping them with essential skills for field service and fleet support. Students will master subsystem troubleshooting techniques for critical components like stages, wafer handling robots, optics, and electronics, utilizing error and event log analysis. The curriculum covers vital preventive maintenance procedures, spare parts management, and software upgrade protocols, ensuring tools operate at peak performance. Furthermore, the course delves into host and SECS/GEM connectivity issues, emphasizing the importance of service documentation and proper escalation procedures. This vendor-neutral approach, centered on integrated and standalone thin-film/optical CD metrology platforms, prepares students to excel in maintaining complex, high-precision equipment in a demanding semiconductor manufacturing environment.
Prerequisites
Course outline
Lectures, virtual labs, and graded assignments — completed in your browser.
Syllabus
**Course Description:** MET 115 introduces students to the critical aspects of field service, diagnostics, and fleet support for semiconductor optical metrology tools. Through a blend of theoretical instruction and practical application, students will learn to troubleshoot complex subsystems, perform preventive maintenance, manage spare parts, execute software upgrades, and resolve connectivity issues. The course emphasizes logical problem-solving, documentation, and effective escalation strategies pertinent to high-precision metrology platforms in the semiconductor industry. **Learning Outcomes:** Upon successful completion of this course, students will be able to: 1. Diagnose and troubleshoot common failures in metrology tool subsystems, including wafer handling, stage, optical, and electronic components, using error logs and diagnostic procedures. 2. Execute preventive maintenance procedures and manage spare parts inventory effectively to minimize tool downtime and ensure operational efficiency. 3. Analyze host and SECS/GEM connectivity issues, identify root causes, and apply appropriate solutions to re-establish tool communication. 4. Perform software upgrades and configuration changes following established protocols, ensuring system stability and functionality. 5. Document service activities thoroughly, identify escalation triggers, and communicate technical issues clearly to higher-level support or engineering teams. **Grading Weights:** * Knowledge Checks: 15% * Assignments: 30% * Quizzes: 25% * Final Exam: 30% **Policies:** * **Attendance:** Regular attendance is expected. Students are responsible for all missed material. * **Late Submissions:** Assignments submitted late may incur a penalty of 10% per day unless prior arrangements have been made with the instructor due to extenuating circumstances. * **Academic Integrity:** All work submitted must be original. Plagiarism or cheating will result in a failing grade for the assignment or course, and may lead to further disciplinary action. * **Safety:** Adherence to all lab safety protocols is mandatory. Failure to comply will result in removal from the lab session. * **Disability Services:** Students requiring accommodations due to a disability should contact the Disability Services office and inform the instructor at the beginning of the semester.