Certificate
Semiconductor Optical Metrology Tool Technician
A 12-credit certificate for technicians who install, calibrate, and service the optical metrology tools used in wafer fabs. You cover measurement fundamentals and fab protocol, optical measurement systems from reflectometry to spectroscopic ellipsometry and scatterometry, calibration, gauge studies and tool-to-tool matching, then field diagnostics, preventive maintenance, software and host connectivity, and service documentation. Coursework is vendor-neutral and covers integrated and standalone thin-film and optical CD platforms in general; Anode is not affiliated with, endorsed by, or an authorized training provider for any tool manufacturer.
Outcomes
What you will be able to do
- 01Explain why fabs measure film thickness and critical dimensions, and where metrology sits in the process flow
- 02Describe reflectometry, spectroscopic ellipsometry, and scatterometry measurement chains
- 03Set up recipes, run gauge studies, and verify precision and tool-to-tool matching
- 04Apply statistical process control to detect tool drift and trigger requalification
- 05Diagnose stage, wafer handling, optics, and electronics faults from logs and symptoms
Careers
Where graduates work
- Metrology equipment technician
- Fab field service engineer
- Process equipment technician
- Tool installation and startup technician
Curriculum
Term 1
Semiconductor Metrology Fundamentals
MET 101 introduces students to the fundamental principles and practices of semiconductor metrology, focusing on optical techniques and their application in semiconductor manufacturing. This course provides essential knowledge for aspiring technicians to operate and maintain critical metrology tools in a cleanroom environment.
Optical Measurement Systems
MET 105 introduces the fundamental principles and practical applications of optical measurement systems commonly used in semiconductor manufacturing. This course provides essential knowledge for technicians working with advanced metrology equipment.
Term 2
Tool Calibration, Matching and Quality Control
MET 110 provides essential training for semiconductor technicians to master tool calibration, matching, and quality control. This course focuses on maintaining the precision and reliability of metrology tools crucial for semiconductor manufacturing.
Field Service, Diagnostics and Fleet Support
This course prepares students to diagnose, maintain, and support semiconductor metrology tools, focusing on critical field service operations. Students will develop practical skills in troubleshooting, preventive maintenance, and fleet support for advanced optical metrology platforms.
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